We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
LiNbO<sub>3</sub>单晶薄膜体声波谐振器的研制.
- Authors
彭 霄; 田本朗; 毛世平; 杜 波; 蒋 欣; 徐 阳; 马晋毅; 蒋平英
- Abstract
The single crystal lithium niobate (LiNbO3) thin film bulk acoustic resonator (FBAR) fabricated by Smart Cut™ technology is introduced in this paper. The COMSOL finite element simulation (FEM) software is used to optimize the material and structure of LiNbO3 thin film FBAR in order to achieve high electromechanical coupling coefficient. A high-performance Z-cut LiNbO3 thin film is fabricated as the piezoelectric layer of the resonator by Smart Cut™ technology. The resulting LiNbO3 thin film bulk acoustic resonator has a resonant frequency of 3 847. 5 MHz and an anti-resonant frequencies of 3 986. 25 MHz. an insertion loss of 1. 81 dB and an effective electromechanical coupling coefficient of 8. 3%.
- Subjects
THIN films; LITHIUM niobate; CRYSTAL resonators; ACOUSTIC resonators; INSERTION loss (Telecommunication)
- Publication
Piezoelectrics & Acoustooptics, 2019, Vol 41, Issue 3, p330
- ISSN
1004-2474
- Publication type
Article
- DOI
10.11977/j.issn.1004-2474.2019.03.003