Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleNanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel.AuthorsZhang, Zhenyu; Guo, Liangchao; Cui, Junfeng; Wang, Bo; Kang, Renke; Guo, DongmingPublicationScientific Reports, 2016, p35269ISSN2045-2322Publication typeArticleDOI10.1038/srep35269