Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.Title7‐1: Distinguished Paper: Reliability Improvement of IGZO‐TFT in Hybrid Process with LTPS.AuthorsAman, Mehadi; Takeda, Yujiro; Ito, Kazuatsu; Yamamoto, Kaoru; Tanaka, Kohei; Matsukizono, Hiroshi; Nakamura, Wataru; Makita, NaokiPublicationSID Symposium Digest of Technical Papers, 2021, Vol 52, Issue 1, p57ISSN0097-966XPublication typeArticleDOI10.1002/sdtp.14609