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- Title
Regime Map of the Effective Medium Approximation Modelling of Micro-Rough Surfaces in Ellipsometry.
- Authors
Huang, Meijiao; Guo, Liang; Jiang, Fengyi
- Abstract
In this work, we discuss the precision of the effective medium approximation (EMA) model in the data analysis of spectroscopic ellipsometry (SE) for solid materials with micro-rough surfaces by drawing the regime map. The SE parameters ψ (amplitude ratio) and Δ (phase difference) of the EMA model were solved by rigorous coupled-wave analysis. The electromagnetic response of the actual surfaces with micro roughness was simulated by the finite-difference time-domain method, which was validated by the experimental results. The regime maps associated with the SE parameters and optical constants n (refractive index) and k (extinction coefficient) of the EMA model were drawn by a comparison of the actual values with the model values. We find that using EMA to model micro-rough surfaces with high absorption can result in a higher precision of the amplitude ratio and extinction coefficient. The precisions of ψ, Δ, n and k increase as the relative roughness σ/λ (σ: the root mean square roughness, λ: the incident wavelength) decreases. The precision of ψ has an influence on the precision of k and the precision of Δ affects the precision of n. Changing σ alone has little effect on the regime maps of the relative errors of SE parameters and optical constants. A superior advantage of drawing the regime map is that it enables the clear determination as to whether EMA is able to model the rough surfaces or not.
- Subjects
FINITE difference time domain method; ELLIPSOMETRY; SOLID surfacing materials; ROOT-mean-squares; OPTICAL constants; ROUGH surfaces
- Publication
Sensors (14248220), 2024, Vol 24, Issue 4, p1242
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s24041242