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- Title
Nanocolumnar Composite Microstructure of Superhard SiC Thin Film Deposited Using Unbalanced Magnetron Sputtering Method.
- Authors
Bae, K.‐E.; Chae, K.‐W.; Park, J.‐K.; Lee, W.‐S.; Baik, Y.‐J.
- Abstract
Nano‐composite microstructure composed of nano‐columnar SiC crystalline grains embedded in an amorphous SiC matrix is responsible for the superhardness of the SiC thin film deposited using unbalanced magnetron sputtering. Hardness larger than 40 GPa, which is much larger than polycrystalline SiC materials, is obtained by controlling its microstructure of the SiC thin films.
- Subjects
THIN films; HARDNESS; TRANSMISSION electron microscopy
- Publication
Advanced Engineering Materials, 2016, Vol 18, Issue 7, p1123
- ISSN
1438-1656
- Publication type
Article
- DOI
10.1002/adem.201600008