We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer.
- Authors
Tsujimoto, Kazuya; Hirai, Yoshikazu; Sugano, Koji; Tsuchiya, Toshiyuki; Tabata, Osamu
- Abstract
A novel sealing technique using sacrificial microchannels was proposed for control of an atmosphere in a micromachined alkali metal vapor cell for a chip-scale atomic magnetometer. The microchannels act as a feedthrough connecting the cell to the outside atmosphere during evacuation and gas filling steps, and eventually they are sealed by glass-frit reflow. A silicon microchannel was designed and sealing by glass-frit reflow was successfully demonstrated in reflow experiments. Simulation results clarified the glass-frit reflow characteristics and their dependence on cross-sectional shapes of the microchannels. Hermeticity of the proposed sealing technique at a leak rate of less than 10−12 Pa·m3/s was verified by a high-resolution helium leak test. © 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 96(5): 58-66, 2013; Published online in Wiley Online Library (wileyonlinelibrary.com). DOI 10.1002/ecj.10432
- Subjects
MICROELECTROMECHANICAL systems; MAGNETOMETERS; MICROREACTORS; ALKALI metals; HERMETIC sealing
- Publication
Electronics & Communications in Japan, 2013, Vol 96, Issue 5, p58
- ISSN
1942-9533
- Publication type
Article
- DOI
10.1002/ecj.10432