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- Title
Metrology of a Focusing Capillary Using Optical Ptychography.
- Authors
Huang, Xiaojing; Nazaretski, Evgeny; Xu, Weihe; Hidas, Dean; Cordier, Mark; Stripe, Benjamin; Yun, Wenbing; Chu, Yong S.
- Abstract
The focusing property of an ellipsoidal monocapillary has been characterized using the ptychography method with a 405 nm laser beam. The recovered wavefront gives a 12.5 × 10.4 μ m 2 focus. The reconstructed phase profile of the focused beam can be used to estimate the height error of the capillary surface. The obtained height error shows a Gaussian distribution with a standard deviation of 1.3 μ m. This approach can be used as a quantitative tool for evaluating the inner functional surfaces of reflective optics, complementary to conventional metrology methods.
- Subjects
METROLOGY; LASER beams; STANDARD deviations; CAPILLARIES; X-ray optics; X-ray microscopy
- Publication
Sensors (14248220), 2020, Vol 20, Issue 22, p6462
- ISSN
1424-8220
- Publication type
Letter
- DOI
10.3390/s20226462