We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis.
- Authors
Toffoli, Valeria; Carrato, Sergio; Dongkyu Lee; Sangmin Jeon; Lazzarino, Marco
- Abstract
The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.
- Subjects
MICROELECTROMECHANICAL systems; RESONATORS; THERMOGRAVIMETRY; ARTIFICIAL cells; GRAVIMETRIC analysis
- Publication
Sensors (14248220), 2013, Vol 13, Issue 12, p16657
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s131216657