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- Title
AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application.
- Authors
Liu, Yichen; Wang, Lihao; Su, Yongquan; Zhang, Yuyao; Wang, Yang; Wu, Zhenyu
- Abstract
This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a diameter of 1.5 mm possessed adjustable optical tilt angles of up to 22.6° @ 30 V, with a high resonance frequency of about 8.2 kHz, while the 3 mm mirror reached 48.5° @ 41 V. The mirror with the gimbaled structure exhibited an excellent field of view and good mechanical decoupling. Additionally, a significant improvement in mirror scanning performance was observed in a vacuum (4 Pa), proving that the optical field of view was magnified by more than a factor of 10.
- Subjects
LIDAR; PIEZOELECTRIC detectors; MIRRORS
- Publication
Micromachines, 2022, Vol 13, Issue 9, p1550
- ISSN
2072-666X
- Publication type
Article
- DOI
10.3390/mi13091550