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- Title
Microstructure of Thin Films of Tantalum and its Compounds.
- Authors
Petrovskaya, A. S.; Lapitskaya, V. A.; Mel'nikova, G. B.; Kuznetsova, T. A.; Chizhik, S. A.; Zykova, A. V.; Safonov, V. I.
- Abstract
By the atomic-force-microscopy method, the authors have studied the microstructure of coatings from tantalum and its compounds, which were formed on the surface of substrates from stainless steel and microscope slide by reactive magnetron sputtering. It has been established that nanostructured tantalum films are characterized by the cellular structure the size of whose cells depends on the material and the physicochemical properties of the substrate surface.
- Subjects
TANTALUM films; THIN films; TANTALUM compounds; TANTALUM; REACTIVE sputtering; MICROSTRUCTURE
- Publication
Journal of Engineering Physics & Thermophysics, 2021, Vol 94, Issue 4, p942
- ISSN
1062-0125
- Publication type
Article
- DOI
10.1007/s10891-021-02371-0