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- Title
INFLUENCE OF PURGE, TIME OF WAITING AND TiCl<sub>4</sub> DOSING TIME IN A LOW-PRESSURE ATOMIC LAYER DEPOSITION (ALD) REACTOR ON PROPERTIES OF TiO<sub>2</sub> LAYER.
- Authors
WALKE, W.; KACZMAREK, M.; STASZUK, M.; BASIAGA, M.
- Abstract
The aim of the study was to evaluate the influence of the ALD process parameters on mechanical properties and corrosion resistance of TiO2 layer. The TiO2 layer was deposited on stainless steel surfaces at constant temperature T = 200 °C and number of cycles nc = 500 (g ≈ 25 nm). The applied methodology consisted of potentiodynamic and impedance studies, as well as adhesion test. The obtained results were the basis for selection of surface treatment method for stainless steel implants for contact with blood. Appropriate parameters of surface treatment realized by means of the ALD method is of significant importance. It will contribute to the development of technological conditions of specified deposition parameters of TiO2 layers on steel implants.
- Subjects
ATOMIC layer deposition; CHEMICAL reactors; TITANIUM oxides; CORROSION resistance; TEMPERATURE
- Publication
Metalurgija, 2017, Vol 56, Issue 1/2, p179
- ISSN
0543-5846
- Publication type
Article