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- Title
Single crystal aluminum deposit formation on isotropic substrates by means of self-organized ion sputtering.
- Authors
Perekrestov, V. I.; Kornyushchenko, A. S.; Kosminskaya, Yu. A.
- Abstract
A substantially new technological approach is considered, which is based on the self-organized formation of aluminum single crystal layer on isotropic substrates in the course of stationary condensation of reverse diffusion fluxes in a planar de magnetron. The functional possibilities of self-organized ion sputtering systems are discussed.
- Subjects
ALUMINUM crystals; ISOTROPY subgroups; MATHEMATICAL crystallography; MAGNETRONS; SPUTTERING (Physics); CATHODE sputtering (Plating process); CONDENSATION
- Publication
Technical Physics Letters, 2006, Vol 32, Issue 10, p868
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785006100154