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- Title
Two-Stage Sintering of Yttrium Iron Garnet Ceramics for Magnetron Sputtering.
- Authors
Luzanov, V. A.; Balashov, V. V.; Lopukhin, K. V.
- Abstract
A two-stage process of sintering yttrium iron garnet ceramics for magnetron sputtering has been proposed and tested. It has been shown that uniaxial pressing of compacts results in the synthesis of nanosized crystallites of yttrium iron garnet. The crystal structure of the obtained ceramic samples has been studied. Epitaxial films are grown on yttrium aluminum garnet substrates by magnetron sputtering of the obtained target.
- Subjects
YTTRIUM iron garnet; MAGNETRON sputtering; CERAMICS; SINTERING; YTTRIUM aluminum garnet; ND-YAG lasers; CRYSTAL structure; FERROELECTRIC thin films
- Publication
Journal of Communications Technology & Electronics, 2022, Vol 67, Issue 6, p690
- ISSN
1064-2269
- Publication type
Article
- DOI
10.1134/S1064226922060158