Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitlePhotoluminescence and Raman Spectroscopy Study on Color Centers of Helium Ion-Implanted 4H–SiC.AuthorsSong, Ying; Xu, Zongwei; Li, Rongrong; Wang, Hong; Fan, Yexin; Rommel, Mathias; Liu, Jiayu; Astakhov, Georgy V.; Hlawacek, Gregor; Li, Bingsheng; Xu, Jun; Fang, FengzhouPublicationNanomanufacturing & Metrology, 2020, Vol 3, Issue 3, p205ISSN2520-811XPublication typeArticleDOI10.1007/s41871-020-00061-8