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- Title
薄膜材料弯曲测试方法的验证研究.
- Authors
黄鑫龙; 李根梓; 周龙飞; 杨绍松; 夏 燕; 董显山; 来 萍; 夏长奉; 宋辰阳; 张晋熙; 韩金哲
- Abstract
In the process of developing the Chinese national standard "Micro-electromechanical systems technology-Bend testing methods of thin film materials", cantilever beam structures with different sizes were designed and prepared to verify the accuracy and practicality of the method used. Their bending deformation processes were recorded by nanoindentation instrumentation, and the deformation-stress curves of the structures were obtained. The bending mechanical properties of thin-film materials can be effectively characterized based on this standard, and the measured data from the bending tests were analyzed. The experimental results show that the repeatability over 10 tests reached 0.32% using this testing method, and the same type of test structure exhbits strong regularity. The test point near the anchor of the cantilever beam exhibits high deformation stiffness, fully consistent with the theoretical prediction. Therefore, the bending test method used in this paper has good repeatability and can be used for testing the bending mechanical properties of thin-film materials.
- Subjects
MECHANICAL behavior of materials; TEST methods; CONFORMANCE testing; THIN films; TEST systems; BEND testing
- Publication
Piezoelectrics & Acoustooptics, 2024, Vol 46, Issue 4, p524
- ISSN
1004-2474
- Publication type
Article
- DOI
10.11977/j.issn.1004-2474.2024.04.018