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- Title
Wavefront Lens Corrector for Studying Flat Surfaces.
- Authors
Toropov, M. N.; Akhsakhalyan, A. A.; Malyshev, I. V.; Mikhaylenko, M. S.; Pestov, A. E.; Salaschenko, N. N.; Chernyshov, A. K.; Chkhalo, N. I.
- Abstract
The method of manufacturing and the results of studies of a lens corrector that converts a spherical diverging front into a plane one and is intended for studying flat surfaces as part of an interferometer with a diffraction comparison wave is described. A feature of the corrector is the use of an aspherical convex surface with a maximum deviation of ~200 μm from the nearest sphere. The first experimental results are presented, indicating the prospects for using ion-beam processing to improve the quality of the wavefront. After the procedure of ion-beam processing, the aberrations over the entire aperture of the corrector decreased by more than 4 times and amounted to the parameter of the height difference PV = 207 nm (~λ/3) and (RMS) = 19.2 nm (~λ/33). On an area with a diameter of 80%, the aberrations fell to the nanometer level: PV = 65 nm (~λ/10) and RMS = 8.3 nm (~λ/76).
- Subjects
CONVEX surfaces; WAVE diffraction; INTERFEROMETRY; SPHERES; DIAMETER
- Publication
Technical Physics, 2024, Vol 69, Issue 3, p730
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/S1063784224020336