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- Title
Measurement of large low-order aberrations by using a series of through-focus Ronchigrams.
- Authors
Akima, Hisanao; Yoshida, Takaho
- Abstract
A method for measuring large aberrations up to second order (defocus, 2-fold astigmatism and axial coma), which uses a through-focus series of Ronchigrams, is proposed. The method is based on the principle that line-focus conditions in Ronchigrams can be locally detected and low-order aberrations can thereby be measured. The proposed method provides auto-tuning of large low-order aberration; in particular, iterative aberration measurement and correction reduce low-order aberrations from several thousand nanometers to less than a few hundred nanometers, which can be handled by conventional fine-aberration tuning methods.
- Subjects
OPTICAL aberrations; ASTIGMATISM (Optics); OPTICAL transfer function; NANOSTRUCTURED materials; OPTICAL distortion
- Publication
Microscopy, 2014, Vol 63, Issue 4, p325
- ISSN
2050-5698
- Publication type
Article
- DOI
10.1093/jmicro/dfu010