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- Title
Three‐hot‐wire acoustic particle velocity sensor with improved detection capability.
- Authors
Li, Zhe; Chang, Wenhan; Gao, Chengchen; Hao, Yilong
- Abstract
This Letter proposes a novel 3‐hot‐wire acoustic particle velocity sensor with high sensitivity and low self‐noise for the first time. Three parallel wires, covered with platinum film, are suspended on silicon substrate by MEMS process. The middle wire works as a heater and the left and right ones work as both heaters and temperature sensors. Compared with the 1‐hot‐wire and 2‐hot‐wire counterparts, this sensor has higher sensitivity and lower self‐noise, showing its potential for sound source localisation, acoustic camera and so on. The self‐noise of the sensor is about 15dB/Hz at 1 kHz and the relative direction sensitivity is as high as 42 dB.
- Publication
Electronics Letters (Wiley-Blackwell), 2019, Vol 55, Issue 3, p201
- ISSN
0013-5194
- Publication type
Article
- DOI
10.1049/el.2018.7680