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- Title
Theoretical and experimental analysis of surface topography and surface roughness evolution in fixed abrasive double-sided planetary lapping of YAG wafers.
- Authors
Yang, Lei; Guo, Xiaoguang; Kang, Renke; Zhu, Xianglong; Jia, Yufan
- Abstract
Double-sided lapping process with fixed abrasive shows a strong capability of achieving high efficiency and high surface quality due to its controllable movement of the abrasive and determined material removal modes, and it can be as an alternative technology for fabricating ultra-precision optical components. However, the formation and evolution of the surface topography and roughness (Ra) were rarely clarified in the previous research due to the complicity of the double-sided lapping process. This paper established a new mathematical analytical model to provide a better scientific understanding of the formation and evolution of the surface topography and roughness, in which the spatial location and protrusion height of abrasive particles, each abrasive-material interaction, kinematics trajectory of abrasive particles, and force balance on the workpiece were considered. A series of lapping experiments on the Y3Al5O12 (YAG) wafer were conducted to verify the feasibility of the proposed model and analyze the influence of processing parameters on surface topography and roughness evolution. The results indicated that the proposed analytical model can be effectively used to predict surface topography and optimize the process parameters of double-sided planetary lapping for better surface roughness. The variation of processing time and rotational speed of the lapping plate (pad) possesses a significant influence on surface topography and Ra values. Better surface Ra values can be achieved by selecting the proper processing time and rotational speed of the lapping plate.
- Subjects
SURFACE topography; SURFACE roughness; SURFACE analysis; ABRASIVES; PARTICLE tracks (Nuclear physics); FINISHES &; finishing; GRINDING &; polishing
- Publication
International Journal of Advanced Manufacturing Technology, 2023, Vol 127, Issue 1/2, p195
- ISSN
0268-3768
- Publication type
Article
- DOI
10.1007/s00170-023-11417-x