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- Title
Effect of the temperature during deposition of AlO films by spray pyrolysis on their passivating properties in a silicon solar cell.
- Authors
Untila, G.; Kost, T.; Chebotareva, A.; Zaks, M.; Sitnikov, A.; Solodukha, O.
- Abstract
The effect of the deposition temperature of AlO in the range 330-530°C by spray pyrolysis on the rear-surface parameters of silicon ( n pp)Cz-Si/AlO solar cells has been studied. It is found that, as the temperature of AlO deposition is increased, all parameters of the rear surfaces decrease; e.g., the photocurrent density decreases from 25.4 to 24.1 mA/cm; the photovoltage decreases from 611 to 598 mV; and the efficiency decreases from 12.2 to 10.9%. This indicates that passivation of the p-type surface with AlO films becomes less effective. It is concluded that, as the temperature of AlO deposition is increased, the value of the positive charge incorporated into the nonstoichiometric interphase SiO layer formed between c-Si and AlO in the course of AlO deposition, which brings about screening of the negative charge localized at the AlO x-SiO x interface and, respectively, a decrease in the field-induced passivation, increases.
- Subjects
TEMPERATURE; ALUMINUM oxide films; PYROLYSIS; SILICON solar cells; PHOTOVOLTAIC effect; SILICON oxide; PHOTOCURRENTS
- Publication
Semiconductors, 2012, Vol 46, Issue 6, p832
- ISSN
1063-7826
- Publication type
Article
- DOI
10.1134/S1063782612060255