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- Title
Micro-Nanostructured Interfaces Fabricated by the Use of Inorganic Block Copolymer Micellar Monolayers as Negative Resist for Electron-Beam Lithography (The authors are grateful to the interest and extended support from Prof. M. Grunze (Angewandte Physikalische Chemie, Heidelberg University) regarding the discussion of XPS data, the use of the XPS, as well as the e-beam, and SEM facilities, and to Dr. J. Curtis and E. Young for carefully reading the manuscript as well as intensive discussions. The Deutsche Forschungsgemeinschaft in the framework of the SP-520 supported this work.)
- Authors
R. Glass; M. Arnold; J. Blümmel; A. Küller; M. Möller
- Publication
Advanced Functional Materials, 2003, Vol 13, Issue 7, p569
- ISSN
1616-301X
- Publication type
Article
- DOI
10.1002/adfm.200304331