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- Title
Resolving Mechanical Properties and Morphology Evolution of Free‐Standing Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>.
- Authors
Tharpe, Troy; Zheng, Xu-Qian; Feng, Philip X.-L.; Tabrizian, Roozbeh
- Abstract
The cover illustrates a free-standing, ferroelectric, hafnia-zirconia nano-resonator, realized from 50nm I Hf i SB 0.5 sb I Zr i SB 0.5 sb I O i SB 2 sb - I Al i SB 2 sb I O i SB 3 sb nanolaminates. Optical excitation and detection of in-plane and out-of-plane resonance modes enables accurate determination of Young's modulus and residual stress. Resolving Mechanical Properties and Morphology Evolution of Free-Standing Ferroelectric Hf0.5Zr0.5O2.
- Subjects
MORPHOLOGY; YOUNG'S modulus; X-ray diffraction measurement; RESIDUAL stresses
- Publication
Advanced Engineering Materials, 2021, Vol 23, Issue 12, p1
- ISSN
1438-1656
- Publication type
Article
- DOI
10.1002/adem.202101221