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- Title
Surface investigations with a combined scanning electron-scanning tunneling microscope.
- Authors
Fuchs, H.; Laschinski, R.
- Abstract
We have combined a scanning tunneling microscope (STM) with a scanning electron microscope (SEM) for surface investigations of atomically flat surfaces, ultrathin adsorbate films, and material surfaces. The mechanical stability of the hybrid instrument allows high-resolution SEM of samples mounted on the STM stage and atomic resolution with the STM. Experimental results of combined SEM/STM investigations on textured material surfaces, submicron structures, and atomically flat conducting surfaces are presented. An example is given for surface machining with the STM under SEM control.
- Publication
Scanning, 1990, Vol 12, Issue 3, p126
- ISSN
0161-0457
- Publication type
Article
- DOI
10.1002/sca.4950120303