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- Title
High-performance flexible transparent conductive thin films on PET substrates with a CuM/AZO structure.
- Authors
Li, Yajie; Wu, Muying; Sun, Yongtao; Yu, Shihui
- Abstract
Hybrid transparent conductive thin films (TCFs) with a bilayer structure composed of aluminum-doped zinc oxide (AZO) and Cu micro-mesh (CuM) are prepared on polyethylene terephthalate (PET) substrates. The AZO layers are deposited by RF magnetron sputtering at room temperature. The CuM is fabricated by UV-lithography and DC magnetron sputtering. The optical properties and conductivity can be modified by the thickness of CuM, and the conduction mechanism involving metal Cu–AZO carrier injection is proposed. The flexible CuM/AZO composite thin films exhibit outstanding optoelectronic performance, with the best figure of merit ≈ 1247 (at average optical transmittance of 85.8%, sheet resistance of 1.9 Ω/sq. and resistivity of 1.89 × 10−4 Ω·cm), as well as excellent mechanical flexibility. The resulting hybrid TCFs with CuM/AZO composite structure show potential applications in flexible electronics, organic light emitting diodes and photovoltaic devices.
- Subjects
THIN films; ORGANIC light emitting diodes; POLYETHYLENE terephthalate; COMPOSITE membranes (Chemistry); MAGNETRON sputtering; DC sputtering; RADIOFREQUENCY sputtering; FLEXIBLE electronics
- Publication
Journal of Materials Science: Materials in Electronics, 2019, Vol 30, Issue 14, p13271
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-019-01690-6