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- Title
Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct.
- Authors
Hideaki Koga; Hiroyuki Mitsuya; Hiroaki Honma; Hiroyuki Fujita; Hiroshi Toshiyoshi; Gen Hashiguchi
- Abstract
We have developed a micro-electro-mechanical systems (MEMS) electrostatic vibratory power generator with over 100 µWRMS of (root-mean-square) output electric power under 0.03 G RMS (G: the acceleration of gravity) accelerations. The device is made of a silicon-on-insulator (SOI) wafer and is fabricated by silicon micromachining technology. An electret built-in potential is given to the device by electrothermal polarization in silicon oxide using potassium ions. The force factor, which is defined by a proportional coefficient of the output current with respect to the vibration velocity, is 2.34 x 10-4 C/m; this large value allows the developed vibration power generator to have a very high power efficiency of 80.7%. We have also demonstrated a charging experiment by using an environmental acceleration waveform with an average amplitude of about 0.03 GRMS taken at a viaduct of a highway, and we obtained 4.8 mJ of electric energy stored in a 44 µF capacitor in 90 min.
- Subjects
MICROELECTROMECHANICAL systems; ELECTROSTATIC motors; ELECTRIC power
- Publication
Micromachines, 2017, Vol 8, Issue 10, p293
- ISSN
2072-666X
- Publication type
Article
- DOI
10.3390/mi8100293