Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleReproducibility in r.f.-GDOES depth profiling analysis of thin films.AuthorsShimizu, K.; Habazaki, H.; Skeldon, P.; Thompson, G. E.PublicationSurface & Interface Analysis: SIA, 2001, Vol 31, Issue 12, p1085ISSN0142-2421Publication typeArticleDOI10.1002/sia.1148