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- Title
Effect of deposition ambient on structural and optical properties of MgZnO alloy thin films grown by RF sputtering.
- Authors
Jia Li; Jin-Hua Huang; Wei-Jie Song; Rui-Qin Tan; Ye Yang; Xiao-Min Li
- Abstract
MgZnO thin films were deposited on Corning eagle 2,000 glass substrates by a RF magnetron sputtering using a ceramic target. The effect of Ar/O ratios on structural and optical properties was investigated. The XRD results showed that the film demonstrated the best structural properties when the Ar/O ratio equal 7:3. Sputtering ambient seemed to have minor effect on the optical properties of MgZnO thin films.
- Subjects
MAGNETRON sputtering; THIN films; GLASS; SUBSTRATES (Materials science); ALLOYS
- Publication
Journal of Materials Science: Materials in Electronics, 2010, Vol 21, Issue 12, p1327
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-010-0070-6