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- Title
Charge properties of aluminum oxide layers synthesized by molecular layering.
- Authors
Sazonov, S. G.; Zuluev, Z. N.; Drozd, V. E.; Nikiforova, I. O.
- Abstract
An investigation was made of the charge and conducting properties of layers of insulator obtained by molecular layering in Si-Al[sub 2]O[sub 3]-A1 structures. No charge trapping in the insulator is observed at 77 K when depleting voltages are applied to the structure.
- Subjects
METAL-insulator transitions; ALUMINUM oxide; LAYER structure (Solids)
- Publication
Technical Physics Letters, 1998, Vol 24, Issue 7, p525
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/1.1262179