Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleFused silica with sub‐angstrom roughness and minimal surface defects polished by ultrafine nano‐CeO<sub>2</sub>.AuthorsWu, Zehua; Zhang, Zhixin; Jia, Yong; Teng, Fei; Li, Gang; Wang, Feng; Jin, YuqiPublicationJournal of the American Ceramic Society, 2023, Vol 106, Issue 3, p1766ISSN0002-7820Publication typeArticleDOI10.1111/jace.18884