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- Title
Formation of Through Holes in Glass Substrates by Laser-Assisted Etching.
- Authors
Masatoshi Yonemura; Satoru Kato; Kazuo Hasegawa; Hidetomo Takahashi
- Abstract
In this study, we worked on the formation of micro through holes in multi-component glass substrates using laser-assisted etching, in which mixed aqueous solutions of hydrofluoric acid (HF) and nitric acid (HNO3) were used for the etching. Glass samples modified by femtosecond laser irradiation were immersed for 10 minutes in aqueous solutions containing 2% HF and between 0 and 32% HNO3. The subsequent optical microscope observations and measurements showed that the highest etch selectivity, which was 21, was obtained with an etch solution containing 6% HNO3. Furthermore, through holes with diameters approaching 20 μm were successfully formed in a 100 μm thick glass substrate without any cracks using the mixed solution.
- Subjects
LASER engraving; NITRIC acid; HOLES (Electron deficiencies); HYDROFLUORIC acid; FEMTOSECOND lasers; OPTICAL microscopes
- Publication
Journal of Laser Micro / Nanoengineering, 2016, Vol 11, Issue 2, p143
- ISSN
1880-0688
- Publication type
Article
- DOI
10.2961/jlmn.2016.02.0001