Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleIndium-doped zinc oxide films prepared by simultaneous r.f. and d.c. magnetron sputtering.AuthorsZhang, Keran; Zhu, Furong; Huan, C. H. A.; Wee, A. T. S.; Osipowicz, T.PublicationSurface & Interface Analysis: SIA, 1999, Vol 28, Issue 1, p271ISSN0142-2421Publication typeArticleDOI10.1002/(SICI)1096-9918(199908)28:1<271::AID-SIA592>3.0.CO;2-1