Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleSub-10 nm High-Aspect-Ratio Patterning of ZnO Using an Electron BeamThe authors thank Mr. P. A. Bonnet for his assistance in TGA and DTA studies.AuthorsM. S. M. Saifullah; K. R. V. Subramanian; D.-J. Kang; D. Anderson; W. T. S. Huck; G. A. C. Jones; M. E. WellandPublicationAdvanced Materials, 2005, Vol 17, Issue 14, p1757ISSN0935-9648Publication typeArticleDOI10.1002/adma.200500484