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- Title
Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements.
- Authors
Haase, Anton; Bajt, Saša; Hönicke, Philipp; Soltwisch, Victor; Scholze, Frank
- Abstract
Cr/Sc multilayer systems can be used as near-normal incidence mirrors for the water window spectral range. It is shown that a detailed characterization of these multilayer systems with 400 bilayers of Cr and Sc, each with individual layer thicknesses <1 nm, is attainable by the combination of several analytical techniques. EUV and X-ray reflectance measurements, resonant EUV reflectance across the Sc L edge, and X-ray standing wave fluorescence measurements were used. The parameters of the multilayer model were determined via a particle-swarm optimizer and validated using a Markov chain Monte Carlo maximum-likelihood approach. For the determination of the interface roughness, diffuse scattering measurements were conducted.
- Subjects
METALLIC films; SCANDIUM; CHROMIUM; OPTICAL multilayers; PARTICLE swarm optimization; MARKOV chain Monte Carlo; X-ray scattering; STANDING waves
- Publication
Journal of Applied Crystallography, 2016, Vol 49, Issue 6, p2161
- ISSN
0021-8898
- Publication type
Article
- DOI
10.1107/S1600576716015776