We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
Detection of an ordered-structure fraction in amorphous silicon.
- Authors
Wang, Xiao-Dong; Chen, Bo; Wang, Hai-Feng; Zheng, Xin; Liu, Shi-Jie; Wang, Jun-Bo; Li, Bo; Yu, Shan-Meng; Cui, Zhong-Xu
- Abstract
Amorphous silicon (a-Si) films were prepared by radio frequency magnetron sputtering. Spectroscopic ellipsometry (SE) was utilized to detect an ordered-structure fraction in a-Si. The SE analysis of a-Si films with different thicknesses (7.0-140.0 nm) demonstrates that no more than 2.81% of medium-range order exists in the samples, and interestingly, there is a thickness dependence of optical constants for a-Si in the range of 1.5-5.0 eV.
- Subjects
AMORPHOUS silicon; AMORPHOUS substances; HYDROGENATED amorphous silicon; SPECTRUM analysis; OPTICAL constants; ELLIPSOMETRY
- Publication
Journal of Applied Crystallography, 2016, Vol 49, Issue 2, p528
- ISSN
0021-8898
- Publication type
Article
- DOI
10.1107/S1600576716002545