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- Title
Tunable, low loss BaSrTiO/BiMgNbO/BaSrTiO multilayer thin films prepared by pulsed laser deposition.
- Authors
Ma, Baogang; Yu, Shihui; Chen, Shengtian; Zhang, Jieling; Huang, Xiushi; Liu, Qing; Zhang, Weifeng
- Abstract
BaSrTiO/BiMgNbO/BaSrTiO (BST/BMN/BST) multilayer thin films and BaSrTiO (BST) thin films were fabricated on Pt/Ti/SiO/Si (1 0 0) substrates by pulsed laser deposition. The multilayer thin films show a dielectric constant of 314 and dielectric loss tangent of 0.006 at frequency of 0.1 MHz. The BST/BMN/BST multilayer thin films had a ~26.7 % relative tunability of dielectric constant at a maximum applied dc bias field of 357 kV/cm, while the figure of merit is 45.5. No obvious hysteresis behavior was observed in the BST/BMN/BST multilayer thin films. The excellent dielectric constant and tunability, low dielectric loss tangent suggest that BST/BMN/BST multilayer thin films have giant potential application for tunable microwave device.
- Subjects
THIN films; SUBSTRATES (Materials science); PULSED laser deposition; PERMITTIVITY; DIELECTRIC loss; HYSTERESIS
- Publication
Journal of Materials Science: Materials in Electronics, 2016, Vol 27, Issue 8, p7947
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-016-4787-8