We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
Tetrahedral Amorphous Carbon (ta-C) Ultra Thin Films for Slider Overcoat Application.
- Authors
Shi, X.; Hu, Y. H.; Hu, L.
- Abstract
Tetrahedral Amorphous Carbon (ta-C) thin film by using Filtered Cathodic Vacuum Arc (FCVA) technique has proven to be wear-resistive and corrosion resistant for a wide range of electrical, optical, and mechanical applications. Many investigations have shown that the ta-C film prepared by the FCVA technique can provide a superior ultra thin overcoat for the sliders and media compared to ECR-CVD and IBD coating technology. The ta-C film excels in terms of the film density, hardness, surface roughness and corrosion resistance. Nanofilm Technology International (NTI) has successfully developed and commercialized the FCVA coating system (FS series) for the slider overcoat application, which provides a good quality film with a high hardness (∼50 GPa), low stress (2∼3 GPa), low macro-particle density (∼1/cm² for particles > 0.3 µm), good uniformity (<4% in 8 inch coating area) and high production repeatability (<5%).
- Subjects
CARBON compounds; THIN films; AMORPHOUS substances
- Publication
International Journal of Modern Physics B: Condensed Matter Physics; Statistical Physics; Applied Physics, 2002, Vol 16, Issue 6/7, p963
- ISSN
0217-9792
- Publication type
Article
- DOI
10.1142/S0217979202010683