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- Title
Fabrication and Evaluation of a Graphene Oxide-Based Capacitive Humidity Sensor.
- Authors
Jinfeng Feng; Xiaoxu Kang; Qingyun Zuo; Chao Yuan; Weijun Wang; Yuhang Zhao; Limin Zhu; Hanwei Lu; Juying Chen
- Abstract
In this study, a CMOS compatible capacitive humidity sensor structure was designed and fabricated on a 200 mm CMOS BEOL Line. A top Al interconnect layer was used as an electrode with a comb/serpent structure, and graphene oxide (GO) was used as sensing material. XRD analysis was done which shows that GO sensing material has a strong and sharp (002) peak at about 10.278°, whereas graphite has (002) peak at about 26°. Device level CV and IV curves were measured in mini-environments at different relative humidity (RH) level, and saturated salt solutions were used to build these mini-environments. To evaluate the potential value of GO material in humidity sensor applications, a prototype humidity sensor was designed and fabricated by integrating the sensor with a dedicated readout ASIC and display/calibration module. Measurements in different mini-environments show that the GO-based humidity sensor has higher sensitivity, faster recovery time and good linearity performance. Compared with a standard humidity sensor, the measured RH data of our prototype humidity sensor can match well that of the standard product.
- Subjects
FABRICATION (Manufacturing); GRAPHENE oxide; COMPLEMENTARY metal oxide semiconductors; X-ray diffraction; CAPACITIVE sensors
- Publication
Sensors (14248220), 2016, Vol 16, Issue 3, p314
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s16030314