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- Title
CARACTERIZACIÓN DE PELÍCULAS DELGADAS DE AlGaAs OBTENIDAS POR MAGNETRON SPUTTERING RF.
- Authors
Losada-Losada, Juan D.; Pulzara-Mora, Álvaro
- Abstract
AlGaAs layers were deposited by RF magnetron sputtering on glass and Si (100) substrates. The substrate temperature was kept constant and the power ratio of the Al and GaAs targets was varied. In order to decrease the effects of decoupling the lattice parameter between the AlGaAs layer and the Si substrate, a GaAs buffer layer was deposited. The X-ray diffraction spectra show that the films are polycrystalline with preferential orientation (111). The Raman spectra show a behavior of two modes, corresponding to TO and LO vibrational modes of GaAs and AlAs, respectively.
- Publication
Momento: Revista de Física, 2018, Issue 57, p50
- ISSN
0121-4470
- Publication type
Article
- DOI
10.15446/mo.n57.68732