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- Title
Approximation of elastic deformations on the surface of a silicon piezoresistive pressure transducer with three-dimensional E-type micromechanical structure.
- Authors
L. Sokolov; N. Agafonova; Yu. Naumov
- Abstract
Approximation expressions for use in calculating tangential deformations on the surface of an E-type silicon piezoresistive membrane pressure transducer with three-dimensional micromechanical structure under actual operating conditions of a permanent joint and restraint by means of a supporting element are obtained.
- Subjects
PIEZOELECTRIC devices; APPROXIMATION theory; ELASTICITY; DEFORMATIONS (Mechanics); SURFACES (Technology); SILICON; PRESSURE transducers; MICROELECTROMECHANICAL systems
- Publication
Measurement Techniques, 2009, Vol 52, Issue 3, p277
- ISSN
0543-1972
- Publication type
Article
- DOI
10.1007/s11018-009-9252-0