Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.Title50‐3: Formation of Source and Drain Regions in Top‐Gate Self‐Aligned Oxide Semiconductor Field‐Effect Transistor.AuthorsOkazaki, Kenichi; Obonai, Toshimitsu; Shima, Yukinori; Yasumoto, Seiji; Koezuka, Junichi; Ishihara, Noritaka; Kurosawa, Yoichi; Yamazaki, ShunpeiPublicationSID Symposium Digest of Technical Papers, 2018, Vol 49, Issue 1, p660ISSN0097-966XPublication typeArticleDOI10.1002/sdtp.12333