We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
Modification of the Ratio between sp<sup>2</sup>- to sp<sup>3</sup>-Hybridized Carbon Components in PECVD Diamond-Like Films.
- Authors
Yunin, P. A.; Okhapkin, A. I.; Drozdov, M. N.; Korolev, S. A.; Arkhipova, E. A.; Kraev, S. A.; Drozdov, Yu. N.; Shashkin, V. I.; Radishev, D. B.
- Abstract
It is known that diamond-like carbon layers consist of carbon components with sp2 (graphite) and sp3 (diamond) hybridizations of electron orbitals. The quantitative ratio between sp2 and sp3 components has a profound effect on the structural, morphological, optical, electrical, and mechanical properties of the films. In this study, the possibility of controlling the fractions of sp2- and sp3-hybridized carbon in diamond-like films produced by plasma-enhanced chemical-vapor deposition onto single-crystal silicon and diamond substrates is analyzed. In-situ methods of controlling the fraction of the sp3 component by varying the power of the capacitive and inductively coupled discharges directly during production of the film and ex-situ methods, in which use is made of thermal annealing and the application of an electric field, are demonstrated.
- Subjects
DIAMOND-like carbon; DIAMONDS; CARBON films; ELECTRIC fields; CARBON; FILMMAKING; GRAPHITE
- Publication
Semiconductors, 2020, Vol 54, Issue 9, p1047
- ISSN
1063-7826
- Publication type
Article
- DOI
10.1134/S1063782620090316