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- Title
Characterization of on-chip miniature multilayer spiral inductors for RFICS.
- Authors
Jian-Yong Xie; Wen-Yan Yin; Jinglin Shi; Kai Kang; Zhizhang David Chen
- Abstract
Several existing closed-form equations for calculating DC inductance and resistance of single-spiral inductors are examined at first, and the most accurate formula is chosen for characterizing the DC inductance of multilayer spiral inductors. The partial element equivalent circuit (PEEC) method is implemented for computing their frequency-dependent (AC) resistance and inductance. To validate our calculated results, we designed and fabricated some multilayer spiral inductors using standard 0.18 μm CMOS technology. The on-chip measurements are carried out so as to obtain two-port S-parameters of these inductors. Excellent agreements are obtained between the calculated and experimental results, which include DC and low-frequency inductances of three-, four-, and fiver-layer spiral inductors, respectively. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 49: 3180–3184, 2007; Published online in Wiley InterScience (www.interscience.wiley.com).DOI 10.1002/mop.22920
- Subjects
ELECTROMAGNETISM; ELECTRIC inductance; ELECTRODYNAMICS; EQUATIONS; ELECTRONICS
- Publication
Microwave & Optical Technology Letters, 2007, Vol 49, Issue 12, p3180
- ISSN
0895-2477
- Publication type
Article
- DOI
10.1002/mop.22920