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- Title
A comprehensive investigation of thermal treatment effects on resonance characteristics in FBAR devices.
- Authors
Linh Mai; Hae-Il Song; Le Minh Tuan; Pham Van Su; Giwan Yoon
- Abstract
This paper presents some methods to improve the resonance characteristics of film bulk acoustic-wave resonator (FBAR) devices. The FBAR devices were fabricated on Bragg reflectors. Thermal treatments were done using sintering and/or annealing processes. The measurement shows a considerable improvement of return loss (S11) and quality factor (Qs/p). These thermal treatments seem very promising for enhancing the FBAR's resonance performance. © 2005 Wiley Periodicals, Inc. Microwave Opt Technol Lett 47: 459–462, 2005; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.21199
- Subjects
RESONANCE; ANALOG resonance; SOUND; RESONATORS; SINTERING
- Publication
Microwave & Optical Technology Letters, 2005, Vol 47, Issue 5, p459
- ISSN
0895-2477
- Publication type
Article
- DOI
10.1002/mop.21199