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- Title
Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement.
- Authors
Li-Sheng Hsu; Shu-Wei Tung; Che-Hsi Kuo; Yao-Joe Yang
- Abstract
This study involved fabricating barbed microtip-based electrode arrays by using silicon wet etching. KOH anisotropic wet etching was employed to form a standard pyramidal microtip array and HF/HNO3 isotropic etching was used to fabricate barbs on these microtips. To improve the electrical conductance between the tip array on the front side of the wafer and the electrical contact on the back side, a through-silicon via was created during the wet etching process. The experimental results show that the forces required to detach the barbed microtip arrays from human skin, a polydimethylsiloxane (PDMS) polymer, and a polyvinylchloride (PVC) film were larger compared with those required to detach microtip arrays that lacked barbs. The impedances of the skin-electrode interface were measured and the performance levels of the proposed dry electrode were characterized. Electrode prototypes that employed the proposed tip arrays were implemented. Electroencephalogram (EEG) and electrocardiography (ECG) recordings using these electrode prototypes were also demonstrated.
- Subjects
ELECTRODES; ELECTRIC admittance; ELECTRIC conductivity research; ELECTROCARDIOGRAPHY; POLYVINYL chloride; ELECTROENCEPHALOGRAPHY
- Publication
Sensors (14248220), 2014, Vol 14, Issue 7, p12370
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s140712370