Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleNovel dual-mode photoresist based on decarboxylation by photogenerated base compound.AuthorsSong, Soyoung; Yokoyama, Shoichi; Takahara, Shigeru; Yamaoka, TsuguoPublicationPolymers for Advanced Technologies, 1998, Vol 9, Issue 6, p326ISSN1042-7147Publication typeArticleDOI10.1002/(SICI)1099-1581(199806)9:6<326::AID-PAT785>3.0.CO;2-5