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- Title
X-ray diffraction characterization of epitaxial CVD diamond films with natural and isotopically modified compositions.
- Authors
Prokhorov, I.; Voloshin, A.; Ralchenko, V.; Bolshakov, A.; Romanov, D.; Khomich, A.; Sozontov, E.
- Abstract
Comparative investigations of homoepitaxial diamond films with natural and modified isotopic compositions, grown by chemical vapor deposition (CVD) on type-Ib diamond substrates, are carried out using double-crystal X-ray diffractometry and topography. The lattice mismatch between the substrate and film is precisely measured. A decrease in the lattice constant on the order of (Δ a/ a) ∼ (1.1-1.2) × 10 is recorded in isotopically modified С (99.96%) films. The critical thicknesses of pseudomorphic diamond films is calculated. A significant increase in the dislocation density due to the elastic stress relaxation is revealed by X-ray topography.
- Subjects
DIAMONDS; X-ray diffraction; EPITAXIAL layers; CHEMICAL vapor deposition; PSEUDOMORPHS
- Publication
Crystallography Reports, 2016, Vol 61, Issue 6, p979
- ISSN
1063-7745
- Publication type
Article
- DOI
10.1134/S1063774516060122