Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleOptimization of a TEOS addition on plasma resistance of YAG ceramics.AuthorsZhao, Cheng‐Cai; Kim, Eun‐Bi; Park, Young‐Jo; Logesh, Govindasamy; Kim, Mi‐Ju; Lee, Jae‐Wook; Ma, Ho Jin; Kim, Ha‐Neul; Ko, Jae‐Woong; Yoon, Seog‐YoungPublicationInternational Journal of Applied Ceramic Technology, 2024, Vol 21, Issue 5, p3200ISSN1546-542XPublication typeArticleDOI10.1111/ijac.14801