Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleImproving Automated TEM Metrology Based on AI Few Shot Learning-DRAM Word Line Patterning Layer and Logic NMOS eSD Seam.AuthorsOh, Seungwoo; Lim, Sung Jin; Lee, Soon-Gun; Jeong, SeongHoon; Song, Changseop; Kong, Chanwoong; Shon, Su-Bong; Park, Hansaem; Lee, SungHo; Choi, Hyunsu; Heo, YumiSubjectsTRANSMISSION electron microscopy; METROLOGY; AUTOMATIONPublicationMicroscopy & Microanalysis, 2023, p1908ISSN1431-9276Publication typeAbstractDOI10.1093/micmic/ozad067.985