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- Title
Approach to combine structural with chemical composition profiles using resonant X-ray scattering.
- Authors
Nayak, Maheswar; Lodha, Gyanendra S.
- Abstract
Resonant X-ray reflectivity can combine the layer sensitivity of the reflectivity technique with the chemical composition sensitivity of the absorption technique. The idea is demonstrated through a depth profile study of the chemical composition of a multi-element thin-film system at the soft X-ray spectral range near the boron K absorption edge. The composition profile of a multi-element low-contrast (<0.6%) thin film is determined from the free surface to buried interfaces within a few atomic percentages of precision and with a nanometre depth resolution.
- Subjects
INTERFACE structures; SURFACE roughness; REFLECTANCE; X-ray scattering; X-ray spectra; BORON; THIN films
- Publication
Journal of Applied Crystallography, 2013, Vol 46, Issue 6, p1569
- ISSN
0021-8898
- Publication type
Article
- DOI
10.1107/S0021889813022905