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- Title
Crystal structures and magnetic properties of Fe–N thin films deposited by dc magnetron sputtering.
- Authors
Zheng, Wei Tao; Wang, Xin; Kong, Xianggui; Tian, Hongwei; Yu, Shansheng; Zhao, Zhudi; Li, Xiaotian
- Abstract
Fe–N thin films were deposited on glass substrates by dc magnetron sputtering under various Ar∕N2 discharge conditions. Crystal structures and elemental compositions of the films were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. Magnetic properties of the films were measured using a superconducting quantum interference device magnetometer. Films deposited at different N2∕(Ar+N2) flow ratios were found to have different crystal structures and different nitrogen contents. When the flow ratios were 60%, 50%, and 30%, a nonmagnetic single-phase FeN was formed in the films. At the flow ratio of 10%, two crystal phases of γ′-Fe4N and ε-Fe3N were detected. When the flow ratio reduced to 5%, a mixture of α-Fe, ε-Fe3N, FeN0.056, and α″-Fe16N2 phases was obtained. The value of saturation magnetization for the mixture was found to be larger than that of pure Fe.
- Publication
Powder Diffraction, 2004, Vol 19, Issue 4, p352
- ISSN
0885-7156
- Publication type
Article
- DOI
10.1154/1.1814980